CX-MFC MASS FLOW METER
CX-MFC-XD-600 Digital Mass Flow Meter / Controller
Application: Mass Flow Meter and Mass Flow Controller are use to measure and control gas accurately. It’s widely used in fields of Semi-conductor / Vaccume / Solar energy / Analyze instrument / photoelectricity / Gas manufactory / Medicare / Power etc.
Features: Very low zero drift and temperature drift. It can measure over 60 types of gas. User can set medium parameters / customize flow range / customize low pressure difference / real-time curve output. User can select different color. User can collect data into EXCEL form. Controlling form: RS232 / RS485 / 0-5V / 4-20MA / different section control / different section combination / High-low level alarm.
Technical Data:
1
|
Flow range
|
(0-5,10,20,30,50,100,200,300,500)SCCM
(0-1,2,3,5,10,20,30,50,100)SLM |
2
|
Accuracy
|
1%FS
|
3
|
Linearity
|
0.5%FS
|
4
|
Repeatability
|
0.2%FS
|
5
|
Responding time
|
Less than 1s
|
6
|
Pressure difference
|
(0.0500.3)Mpa
|
7
|
Max.Pressure
|
10MPa
|
8
|
Working temperature
|
5-65℃
|
9
|
Input/output
|
Digital:RS232/RS485
Analog: 0-5vdc or 4-20mA |
10
|
Power Supply
|
7-16vdc,1A
|
11
|
Weight
|
1.0kg
|
XD-300 Digital Mass Flow Meter / Controller
Application:Mass Flow Meter and Mass Flow Controller are use to measure and control gas accurately. It’s widely used in fields of Semi-conductor / Vaccume / Solar energy / Analize instrument / photoelectricity / Gas manufactory / Medicare / Power etc.
Features: Very low zero drift and temperature drift. It can measure over 60 types of gas. User can set medium parameters / customize flow range / customize low pressure difference / real-time curve output. User can select different color. User can collect data into EXCEL form. Controlling form: RS232 / RS485 / 0-5V / 4-20MA / different section control / different section combination / High-low level alarm.
Technical Data:
1
|
Flow range
|
(0-5,10,20,30,50,100,200,300,500)SCCM
(0-1,2,3,5,10,20,30,50,100)SLM |
2
|
Accuracy
|
1%FS
|
3
|
Linearity
|
0.5%FS
|
4
|
Repeatability
|
0.2%FS
|
5
|
Responding time
|
Less than 1s
|
6
|
Pressure difference
|
(0.0500.3)Mpa
|
7
|
Max.Pressure
|
10MPa
|
8
|
Working temperature
|
5-65℃
|
9
|
Input/output
|
Digital:RS232/RS485
Analog: 0-5vdc or 4-20mA |
10
|
Power Supply
|
7-16vdc,1A
|
11
|
Weight
|
1.0kg
|
Outline figure and conncetion define
Connection type and pipe size: Swagelok: DN3/6/10, 1/4” 3/8” ….
VCR connector: 1/4” 3/8” 1/8”
Pipe: S.S.316L / PTFE / Rubber
Production line:
Installation:
Series of products:
Shipping:
Group:
Certificates:
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